微机械热电堆红外探测器由于无需致冷，后续检测电路简单，成本低等优点在许多领域得到了广泛应用。提出了一种采用互补金属氧化物半导体(CMOS)兼容技术及自对准工艺制作的微机械热电堆红外探测器，以减小微机械热电堆红外探测器的工艺复杂度，减小微小释放孔结构的制作难度。和传统的微机械热电堆红外探测器相比，自对准微机械热电堆红外探测器的释放孔大小是由多晶硅热电偶臂之间的间距确定，而不是由光刻工艺确定。为研究自对准微机械热电堆红外探测器性能和热电堆结构之间的关系，设计并制作了两种不同结构的自对准微机械热电堆红外探测器。测试结果表明方形热电堆结构可以获得大的输出电压及响应率，圆形热电堆结构则可以获得快的响应和大的探测率。

By applying the microring resonator to the Mach-Zehnder (MZ) optical modulator and employing the super-linear phase change characteristic of the all-pass filter, the sublinear modulation curve of the conventional MZ modulator is highly linearized. With properly controlled power coupling between the microring and the arm of the MZ modulator, the third-order distortion can be suppressed. If the transmission coefficient is set between 0.25 and 0.42, the linearity range larger than 90% can be easily achieved. The maximum linearity range is even up to 99.5%.

A 1 × 25 star coupler is designed through calculation and beam propagation method (BPM) simulation. Improvement methods are focused on the design of the tapered waveguides in the device, improving the uniformity of the output light power of the star coupler. Utilizing the conventional Si process technology, the device is fabricated based on silicon-on-insulator (SOI) material. The test result shows that the star coupler has a perfect function of power splitting.

本文对409例尖锐湿疣患者,根据损害的轻重和部位,采用药物、电灼术、冷冻及化疗、手术、CO2激光烧灼等治疗方法.结果表明,CO2激光治疗尖锐湿疣效果满意,治愈率达98%以上.